1.Product Description
Product name | Titaniumtarget/disc/disk |
Material | Titanium Gr2, Gr5 or CoCr alloy,Zirconium Or as customers' request |
Standard | ASTM B381;ASTM F67,ASTM F136 |
Size | Ø98mm/98.5mm*L Ø50-2000*H 10-500mm Oras customer’s requirement. |
Technique | ForgedandCNCMachined |
Status | Annealed |
Type | Round target |
Surface | CNC lathe surface. |
Certificate | SO9001:2008, TUV, EN10204.3.1 |
2.Chemical composition(Wt%)
ASTMNo. | Femax | O max | Nmax | Cmax | Hmax | Al | V | Bal |
Grade2 | 0.3 | 0.25 | 0.03 | 0.1 | 0.015 | - | - | Ti |
Grade5 | 0.3 | 0.2 | 0.05 | 0.08 | 0.015 | 5.5-6.75 | 3.5-4.5 | Ti |
3.Physical Properties(Min)
ASTMGrade | AlloyComposition | TensileStrength | YieldStrength | Elongation min % | ||
ksi | Mpa | ksi | Mpa | |||
Grade2 | UnalloyedTi ("Pure")35A-CP1 | 58 | 400 | 40 | 275 | 20 |
Grade5 | Ti6Al4V | 130 | 895 | 120 | 825 | 10 |
4.Application
Titanium sputter target material can be used in CD-ROM, decoration, flat panel display, and other optical information storage space industries, automotive glass and construction glass, optical communications, etc.